| Description |
1 online resource (235 pages) |
| Series |
Developments in Surface Contamination and Cleaning Series ; Volume 8
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| Bibliography |
Includes bibliographical references and index. |
| Summary |
As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. Several novel wet and dry surface cleaning methods are addressed in this Volume. Many of these methods have not been reviewed previously, or the previous reviews are dated. These methods are finding increasing commercial application and the information in this book will be of high value to the reader. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control these books will be an invaluable reference for researchers and engineers in R & D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography. |
| Contents |
Front Cover; Developments in Surface Contamination and Cleaning: Cleaning Techniques; Copyright; Contents; Contributors; Preface; About the Editors; Chapter 1: How Green and Does it Clean: Methodologies for Assessing Cleaning Products for Safety and Performance; 1. Background; 2. Environmental Concerns; 3. Green Cleaning; 4. Regulatory Aspects; 5. Product Selection; 6. Green Assessment-What Makes a Product Green?; 6.1. Pollution Prevention Options Assessment Tool (P2OASys); 6.2. Green Screen; 6.2.1. Human Health Group I; 6.2.2. Human Health Group II and II |
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6.2.3. Environmental Toxicity and Fate6.2.4. Physical Hazards; 6.2.5. Green Screen Process Steps; 6.3. Environmental Protection Agency Design for the Environment; 6.3.1. Acute Mammalian Toxicity; 6.3.2. Carcinogenicity; 6.3.3. Genetic Toxicity; 6.3.4. Neurotoxicity; 6.3.5. Repeated Dose Toxicity; 6.3.6. Reproductive and Developmental Toxicity; 6.3.7. Respiratory Sensitization; 6.3.8. Skin Sensitization; 6.3.9. Environmental Toxicity and Fate; 6.3.10. Eutrophication; 6.4. Green Seal Environmental Standard for Cleaning and Degreasing Agents (GS 34); 6.4.1. Toxic Compounds |
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6.4.2. Carcinogens and Reproductive Toxins6.4.3. Corrosivity and Causticity; 6.4.4. Skin and Eye Irritation; 6.4.5. Flammability and Ignitability; 6.4.6. VOC Content; 6.4.7. Ozone Depletion; 6.4.8. Toxicity to Aquatic Life; 6.4.9. Aquatic Biodegradability; 6.4.10. Eutrophication; 6.4.11. Disposal; 6.4.12. Animal Testing; 6.5. Quick Guide for Tools; 7. Performance Testing/Efficacy Evaluation; 7.1. Basic Testing Process; 7.1.1. Phase I Product Selection; 7.1.2. Phase II Temperature and Concentration Studies; 7.1.3. Phase III Mechanical Energy Studies |
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7.1.4. Phase IV Actual Product Cleaning Studies7.1.5. Phase V Pilot Plant/Scale-Up Feasibility Studies; 7.2. Case Studies; 7.2.1. Case Study1-Shedding Some Light on Laboratory Versus Field Practices [22]; 7.2.2. Case Study2-Thinking Outside the Cable Box-Wire & Cable Company Uses Floor Stripper on Cables [23]; 7.2.3. Case Study3-A Gear Company Decides to Go all the ̀̀Wayqueous ́ ́-Greasing the Wheels for Regulatory Change and Resis...; 7.3. Case Study Summary; 8. Summary; Appendix A. Contact Information for Cleaning Products and Suppliers |
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Appendix B. Contact Information for Soils and Contaminants and SuppliersReferences; References; References; References; References; Chapter 2: UV-Ozone Cleaning for Removal of Surface Contaminants; 1. Introduction; 2. Surface Contamination and Cleanliness Levels; 3. Principles of UV-Ozone Cleaning; 4. Process Variables; 4.1. UV Sources; 4.2. Distance from the Source; 4.3. Precleaning; 4.4. Types of Contaminants; 4.5. Types of Substrates; 5. Cleaning Systems; 5.1. Costs; 5.1.1. Examples of Cost Savings; 6. Advantages and Disadvantages of UV-Ozone Cleaning; 6.1. Advantages; 6.2. Disadvantages |
| Language |
English. |
| Subject |
Surfaces (Technology)
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Surface contamination -- Prevention.
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Particles -- Measurement.
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Cleaning.
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Coatings.
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Dust control.
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Surfaces (Technologie) |
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Nettoyage. |
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Revêtements. |
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Poussière -- Lutte contre. |
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cleaning. |
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coating (material) |
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Cleaning |
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Coatings |
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Dust control |
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Particles -- Measurement |
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Surfaces (Technology) |
| Added Author |
Kohli, Rajiv, 1947-
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Mittal, K. L., 1945-
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| Other Form: |
Print version: Kohli, Rajiv. Developments in Surface Contamination and Cleaning : Cleaning Techniques. Burlington : Elsevier Science, ©2014 9780323299619 |
| ISBN |
9780323312714 (electronic bk.) |
|
0323312713 (electronic bk.) |
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