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Title Handbook of optical metrology : principles and applications / edited by Toru Yoshizawa. [O'Reilly electronic resource]

Edition Second edition.
Publication Info. Boca Raton : CRC Press, Taylor & Francis Group, [2015]
©20
©2015
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Description 1 online resource (xiii, 905 pages) : illustrations
Bibliography Includes bibliographical references and index.
Contents Chapter 1: Light Sources; Chapter 2: Lenses, Prisms, and Mirrors; Chapter 3: Optoelectronic Sensors; Chapter 4: Optical Devices and Optomechanical Elements; Chapter 5: Propagation of Light; Chapter 6: Interferometry; Chapter 7: Holography; Chapter 8: Speckle Methods and Applications; Chapter 9: Moir©♭ Metrology; Chapter 10: Optical Heterodyne Measurement Method; Chapter 11: Diffraction; Chapter 12: Light Scattering; Chapter 13: Polarization; Chapter 14: Near-Field Optics.
Chapter 15: Length and SizeChapter 16: Displacement; Chapter 17: Straightness and Alignment; Chapter 18: Flatness; Chapter 19: Surface Profilometry; Chapter 20: Three-Dimensional Shape Measurement; Chapter 21: Fringe Analysis; Chapter 22: Photogrammetry; Chapter 23: Optical Methods in Solid Mechanics; Chapter 24: Optical Methods in Flow Measurement; Chapter 25: Polarimetry; Chapter 26: Birefringence Measurement; Chapter 27: Ellipsometry; Chapter 28: Optical Thin Film and Coatings; Chapter 29: Film Surface and Thickness Profilometry.
Chapter 30: Optical Coherence Tomography for Industrial ApplicationsChapter 31: Interference Microscopy for Surface Structure Analysis; Chapter 32: Noncontact Dimensional and Profile Metrology by Video Measurement; Chapter 33: Optical Metrology in Manufacturing Technology; Chapter 34: On-Machine Measurements.
Subject Optical measurements -- Handbooks, manuals, etc.
Metrology -- Handbooks, manuals, etc.
Mesures optiques -- Guides, manuels, etc.
Métrologie -- Guides, manuels, etc.
Metrology
Optical measurements
Genre Electronic books.
Handbook
handbooks.
Handbooks and manuals
Handbooks and manuals.
Guides et manuels.
Added Author Yoshizawa, Tōru, 1939- editor.
Other Form: Print version: Handbook of optical metrology. Second edition 9781466573598 (DLC) 2014042945 (OCoLC)894149535
ISBN 9781466573611 (electronic bk.)
1466573619 (electronic bk.)
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