| Description |
1 online resource (xiii, 240 pages, 8 pages) |
|
data file rda |
| Bibliography |
Includes bibliographical references. |
| Contents |
1. Nanosphere lithography for high-density nanopatterning / Hirotaka Oshima -- 2. Dry etching of semiconductors at the nano and micro-scale / S.J. Pearton -- 3. Nanoscale split ring resonator-based metamaterials : fabrication techniques, properties, and applications / Basudev Lahiri [and others] -- 4. Nanofabrication technologies for surface texturing of gallium nitride photonic crystal light-emitting diodes / Faiz Rahman [and others] -- 5. On-film formation of nanowires : a route to defect-free nanowire growth and device fabrication / Jin-Seo Noh [and others] -- 6. Nanotrenches : an optical lithography process for high-aspect-ratio sub-100 nm gaps / Jean-Francois Dayen, Vina Faramarzi, and Bernard Doudin -- 7. High-aspect-ratio metallic nanostructures for transparent electrodes / Joong-Mok Park [and others] -- 8. Fabrication of nanogap electrodes by electroless- and electro deposition / Luis De Los Santos Valladares [and others] -- 9. Nanometer-scale processing by tribological action and its potential applications / Shojiro Miyake and Mei Wang -- 10. Nanomaterial integration on CMOS platform / Sumita Santra, Prasanta Kumar Guha, and Florin Udrea -- 11. Focused ion beam fabrication of metallic nanostructures / Michal Urbánek and Tomáš Šikola -- 12. Nanotechnology showcase. |
| Summary |
This book provides several examples of how diverse nanofabrication techniques are being used by researchers across the world to fabricate useful materials and devices. A number of research groups present their cutting-edge work on fabricating a variety of nanoscale structures such as split rings, wires, gaps, trenches, and holes. The innovative techniques described in this book will be of interest to all who are engaged in research and development of nanofabrication technologies. The book mainly covers application areas in electronics and photonics but the techniques are general enough to b. |
| Subject |
Nanomanufacturing.
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Nanotechnology.
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Nanofabrication. |
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Nanotechnologie. |
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Nanomanufacturing |
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Nanotechnology |
| Added Author |
Rahman, Faiz.
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| Other Form: |
Print version: Vistas in Nanofabrication. Pan Stanford Pub 2012 9789814364560 (OCoLC)767570565 |
| ISBN |
9789814364577 (electronic bk.) |
|
9814364576 (electronic bk.) |
| Standard No. |
10.1201/b12779 doi |
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