| Description |
1 online resource (xiii, 306 pages) : illustrations |
| Bibliography |
Includes bibliographical references and index. |
| Contents |
1. The world of MEMS -- 2. Basic fabrication processes -- 3. Surface micromachining -- 4. High-aspect-ratio micromachining -- 5. MEMS testing -- 6. MEMS packaging -- 7. Clean rooms, buildings and plant -- 8. The MEMSCOST spreadsheet -- 9. Product costs : accelerometers -- 10. Product costs : microphones -- 11. MEMS foundries -- 12. Financial reporting and analysis -- 13. Conclusions. |
| Summary |
This volume demonstrates show cost analysis can be adapted to MEMS, taking into account the wide range of processes and equipment, the major differences with the established semiconductor industry, and the presence of both large-scale, product-orientated manufacturers and small- and medium-scale foundries. The content examines the processes and equipment sufficiently for the reader to appreciate how costs arise. |
| Subject |
Microelectromechanical systems -- Costs.
|
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Microelectromechanical systems industry -- Costs.
|
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Microsystèmes électromécaniques -- Coût. |
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Microsystèmes électromécaniques -- Industrie -- Coût. |
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Microelectromechanical systems |
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Microelectromechanical systems industry |
| Other Form: |
Print version: Mems cost analysis. [S.l.] : Pan Stanford Pub, 2013 981441106X (OCoLC)823578121 |
| ISBN |
9789814411073 |
|
9814411078 |
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