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Author Kao, Imin I., author.

Title Wafer manufacturing : shaping of single crystal silicon wafers / Imin Kao, Chunhui Chung. [O'Reilly electronic resource]

Edition First edition.
Publication Info. Hoboken, NJ : John Wiley & Sons Ltd, 2021.
©2021
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Description 1 online resource (xiv, 290 pages) : illustrations (some color)
Bibliography Includes bibliographical references and index.
Summary "A wafer (often from silicon crystals) is a thin slice of semiconducting material, upon which microcircuits are constructed by doping, etching, and deposition of various materials. Generally, they are cut from a semiconductor using a diamond saw, then polished on one or both faces. Wafer slicing is the first post crystal-growth step toward producing a polished wafer for electronic device fabrication in the semiconductor and photovoltaic (PV) industry. Advanced slicing technologies such as wiresawing are nowadays widely used in wafer production because of its ability to cut single crystalline and polycrystalline crystals with large diameter and produce wafers from thick (a few mm) to very thin sizes (300 microns)."-- Provided by publisher.
Subject Semiconductor wafers -- Design and construction.
Semiconductor wafers -- Design and construction
Added Author Chung, Chunhui, author.
Other Form: Print version: Kao, Imin I.. Wafer manufacturing First edition. Hoboken, NJ : Wiley, 2021. 9780470061213 (DLC) 2020034639
ISBN 9781118696224 electronic book
1118696220 electronic book
9781118696255 electronic book
1118696255 electronic book
9781118696231 electronic book
1118696239 electronic book
hardcover
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